TMFC SERIER
Thermal Mass Flow Controller
Specifictions
· Highly Accuracy at Low Flow
· Fast Response(≦1.0)
· Wide Pressure Range Available(1300 PSIG)
· No Leakage
· No Temperature or Pressure Required
· Connection compatible
· High stable removable sensor
· Corrosion resistance Value
· Excellent Linearity
· Excellent long term Stability
· Modular design
· Compact Flow Control System
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Model
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TMFC30V
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TMFC30A
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TMFC50V
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TMFC50A
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Flow Range(N2)
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10sccm~30SLM
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10sccm~30SLM
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10scc~50SLM
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10scc~50SLM
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Response Time
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≦1.0 sec
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Accuracy
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±1.0 % FS
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Repeatability
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±0.25 % FS
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Proof Pressure
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1300 PSIG
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Leak rate
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1 x 10-9 atm.cc/sec or less
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Working temperature Range
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0~50℃
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Materials of parts in contact w/gases
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Body:SUS316
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Valve seat:Vition™(Option Bura™ or Kalrez™ or Teflon™)
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Joint
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Standard:1/4 compression
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Option: 1/8 compression,1/4 VCR™,3/8 Compression,VCR™
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Electrical connections
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Dsub 15-pin male connector per standards
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Flow rate input signals
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0~5 Vdc
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4~20mA
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0~5 Vdc
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4~20mA
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Flow rate output signals
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0~5 Vdc
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4~20mA
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0~5 Vdc
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4~20mA
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required power supply
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＋15~28 Vdc/350mA
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