FGT-TMFC-Series Mass Flow meter controller

Model No.︰TMFC30V

Brand Name︰FGT

Country of Origin︰Taiwan, China

Unit Price︰US $ 650 / pc

Minimum Order︰10 pc

TMFC SERIER
_{Thermal Mass Flow Controller}

Specifictions

· Highly Accuracy at Low Flow

· Fast Response(≦1.0)

· Wide Pressure Range Available(1300 PSIG)

· No Leakage

· No Temperature or Pressure Required

· Connection compatible

· High stable removable sensor

· Corrosion resistance Value

· Excellent Linearity

· Excellent long term Stability

· Modular design

· Compact Flow Control System

Model	TMFC30V	TMFC30A	TMFC50V	TMFC50A
Flow Range(N2)	10sccm~30SLM	10sccm~30SLM	10scc~50SLM	10scc~50SLM
Response Time	≦1.0 sec
Accuracy	±1.0 % FS
Repeatability	±0.25 % FS
Proof Pressure	1300 PSIG
Leak rate	1 x 10-9 atm.cc/sec or less
Working temperature Range	0~50℃
Materials of parts in contact w/gases	Body:SUS316
	Valve seat:Vition™(Option Bura™ or Kalrez™ or Teflon™)
Joint	Standard:1/4 compression
	Option: 1/8 compression,1/4 VCR™,3/8 Compression,VCR™
Electrical connections	Dsub 15-pin male connector per standards
Flow rate input signals	0~5 Vdc	4~20mA	0~5 Vdc	4~20mA
Flow rate output signals	0~5 Vdc	4~20mA	0~5 Vdc	4~20mA
required power supply	＋15~28 Vdc/350mA